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Inner Layer_ccd Alignment Parallel Light Exposure Machine

Inner Layer_ccd Alignment Parallel Light Exposure Machine

Alignment accuracy verification before double CCD exposure.
Parallel light exposure system.

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Alignment accuracy verification before double CCD exposure.
Parallel light exposure system.

Alignment accuracy verification before double CCD exposure.
Parallel light exposure system.
The alignment check accuracy is ±10μm.
Repeat alignment accuracy ±10μm.
The exposure resolution is 3mil.